Measuring of aspheres

3D non-contact profilometer for measuring of rotationally symetric shapes. Spheres and aspheres with- and without point of inflection. Measured part is fixtured with a mechanical self centering holder or with the HD chuck holder.

Measurement features:

• plano, rotationally symetric spherical and aspherical polished and opaque concave or convex surfaces up to 260 mm in diameter in accuracy up to 50 nm
• surfaces with numerical aperture up to 1 (full hemispheres)
• any radiuses of curvature
• form deviation of plano, spherical and aspherical surfaces with capability to exporting data for following correction
   

2D contact profilometer for measuring of profiles of different shapes, angles, steep steps etc. Measured part is laying on adjustable table, fixtured with a mechanical self centering holder or with the HD chuck holder.

Measurement features:

• plano, spherical and aspherical polished and ground concave or convex surfaces up to 200 mm in diameter in accuracy up to 0,2 um
• height of steep steps, coatings etc.
• roughtness evaluation
• any radiuses od curvature
• maximum sample height 47 mm (depends on used stylus length)
• form deviation of plano, spherical and aspherical surfaces with capability to exporting data for following correction